摘要： 利用朗缪尔探针检测射频耦合等离子体特性参数时，测得的伏安特性曲线会受电磁干扰而产生畸变，从而影响等离子体参数的计算和特性分析。为此，利用Savitzky-Golay(SG)滤波算法对伏安特性曲线进行分段滤波，给出平滑效果较好的特性参数。实验结果表明，SG算法对原始信号特征改变较少，求出的电子能量概率函数准确度较高。
关键词:
朗缪尔探针,
等离子体,
伏安特性曲线,
SG滤波,
电子能量概率函数
Abstract: While measuring radio frequency plasma’s parameters by Langmuir probe, the I-V characteristic curve is always distorted by electromagnetic interference, and this influences the parameters calculation and analysis. This paper adopts a Savitzky-Golay(SG) filtering algorithm which is used for smoothing I-V characteristic curve, and this brings accurate parameters. Experimental results show Savitzky-Golay filtering of the divided I-V characteristic can bring low signal distortion rate and high accurate Electron Energy Probability Function(EEPF).
Key words:
Langmuir probe,
plasma,
I-V characteristic curve,
Savitzky-Golay(SG) filtering,
Electron Energy Probability Function(EEPF)
中图分类号:
桑庆双, 程健. SG滤波在朗缪尔探针信号处理中的应用[J]. 计算机工程, 2011, 37(17): 220-222,226.
SANG Qiang-Shuang, CHENG Jian. Application of SG Filtering in Langmuir Probe Signal Processing[J]. Computer Engineering, 2011, 37(17): 220-222,226.