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计算机工程 ›› 2009, Vol. 35 ›› Issue (10): 232-234. doi: 10.3969/j.issn.1000-3428.2009.10.077

• 工程应用技术与实现 • 上一篇    下一篇

基于eM-Plant的虚拟晶圆制造自动组合装置

李 飞,伍乃骐   

  1. (广东工业大学机电工程学院,广州 510006)
  • 收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2009-05-20 发布日期:2009-05-20

Virtual Cluster Tool in Wafer Fabrication Based on eM-Plant

LI Fei, WU Nai-qi   

  1. (School of Mechatronics Engineering, Guangdong University of Technology, Guangzhou 510006)
  • Received:1900-01-01 Revised:1900-01-01 Online:2009-05-20 Published:2009-05-20

摘要: 针对难以用解析法验证半导体加工装置的调度可行性问题,提出仿真建模研究的新方法。利用仿真软件eM-Plant建立晶圆制造中单臂自动组合装置的参数化仿真模型,构建一个虚拟的晶圆制造系统。该系统为研究自动组合装置控制问题提供有效手段,是验证半导体制造生产调度可行性的仿真平台。

关键词: 晶圆制造, 自动组合装置, 仿真

Abstract: With wafer residency time constraints in cluster tools for semiconductor fabrication, feasibility of schedule and control can not be checked analytically. A new method based on simulation is presented, and a virtual single-arm cluster tool for controller testing is developed by using eM-Plant. It is a parameterized model which provides an effective tool for researchers to study the control problem of cluster tools, and for engineers to check feasibility of a schedule for them.

Key words: wafer fabrication, cluster tool, simulation

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