基于Simul8的半导体生产线建模关键技术研究

检索

作者投稿和查稿主编审稿专家审稿编委审稿远程编辑

方明;乔非;刘文胜;许潇红

Research on Key Technique of Modeling Semiconductor Production Line Based on Simul8

FANG Ming; QIAO Fei; LIU Wensheng; XU Xiaohong

计算机工程 . 2006, (19): 248 -250 . DOI: 10.3969/j.issn.1000-3428.2006.19.089