基于光刻模型的光学邻近校正切分优化方法

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作者投稿和查稿主编审稿专家审稿编委审稿远程编辑

沈泫, 史峥

Segmentation Optimization Method for Optical Proximity Correction Based on Lithography Model

CHEN Juan, SHI Zheng

计算机工程 . 2011, (23): 211 -213,225 . DOI: 10.3969/j.issn.1000-3428.2011.23.072