基于卷积神经网络的晶圆缺陷检测与分类算法

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作者投稿和查稿主编审稿专家审稿编委审稿远程编辑

邡鑫,史峥

Wafer Defect Detection and Classification Algorithms Based on Convolutional Neural Network

FANG Xin,SHI Zheng

计算机工程 . 2018, (8): 218 -223 . DOI: 10.19678/j.issn.1000-3428.0047107