半导体器件内部缺陷标注与检测方法研究

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白宇, 王珺, 冉红雷, 安胜彪

Research on Internal Defect Annotation and Detection Methods of Semiconductor Devices

BAI Yu, WANG Jun, RAN Honglei, AN Shengbiao

计算机工程 . 2024, (12): 245 -253 . DOI: 10.19678/j.issn.1000-3428.0068712