摘要： 总结了Petri网在半导体生产线建模中的应用,着重针对半导体生产线大规模、可重入、可靠性、混合加工方式、不确定性等特殊复杂性,对多种扩展Petri网模型进行了分析和比较,并进一步探讨了基于Petri网模型和扩展Petri网模型的半导体生产线建模方法,指出了存在的问题,并探讨了可能的研究方向。

关键词: Petri网, 半导体制造, 模型, 建模

Abstract: The applications of Petri nets in semiconductor manufacturing system are reviewed. Aiming at some special complexities of semiconductor manufacturing system, such as large-scale,reentrance, reliability, mixed processing, uncertainty and so on, various extended Petri net models, as well as their modeling approaches are analyzed and compared. Then the problems are discussed and the further research of semiconductor manufacturing system based on Petri net is given.

中图分类号: 

• TP311.52