Abstract: Aiming at improving the measuring performance of Atomic Force Microscope(AFM), an open-structure controller is designed based on RTLinux with software and hardware constructed completely. The experimental results show that the RTLinux based control system is capable of controlling the AFM system. Thus more advanced control algorithms such as adaptive PID and control are expected to be implemented on this open platform and to enhance the scanning speed and resolution. Besides, this control platform can be extended to an open nano-manipulation platform which will faciliate future research on nano-manipulation.

Key words: Atomic Force Microscope(AFM), RTLinux system, feedback control

摘要： 为了提高原子力显微镜(AFM)的测量性能，利用RTLinux良好的实时性，设计了一种开放式的反馈控制平台，完成了基于RTLinux的AFM实时反馈控制系统的软硬件设计，并在PC上具体实现这种实时反馈系统。测试结果表明，该系统能较好地实现AFM在Z方向上的实时反馈控制。利用该平台良好的开放性，可以将各种先进的控制方法应用于AFM系统中，以提高原子力显微镜的扫描速度和精度。此外，该基于RT-Linux的AFM系统还可以扩展成为一个开放式的纳米操作平台。

关键词: 原子力显微镜, RTLinux系统, 反馈控制

CLC Number: 

• N945