摘要： 反馈是扫描探针显微镜控制的核心技术，但目前SPM通常使用基于模拟电路的反馈，因而基于数字信号处理器的数字反馈控制器具有较高的实用价值。该文设计了一种基于DSP的SPM数字反馈控制器，并介绍了其软硬件的设计及算法的改进。测试表明，该反馈控制器功能正常，稳定性和灵活性比模拟反馈控制器有较大的提高。

关键词: 扫描探针显微镜, 反馈, 控制器, 数字信号处理

Abstract: The feedback controller is a core technique of a scanning probe microscope(SPM), but the feedback of SPM using at the present time is usually based on analog circuit, therefore a feedback based on digital signal processor(DSP) possesses high practical value. Through analyzing of an analog feedback, a digital feedback based on DSP and related hardware and software are developed while the improved algorithm is presented. Experimental tests show that the feedback controller can supply various functions correctly, at the same time, the stability and flexibility of the feedback controller are improved obviously.

Key words: Scanning probe microscope (SPM), Feedback, Controller, Digital signal processing (DSP)