摘要： 针对高反射曲面零件的三维形貌测量，提出基于迭代的光栅相位偏折测量方法，通过建立相位偏折信息与工件表面梯度和高度的对应关系，采用结合区域波前重构和路径积分的三维重建算法，由梯度恢复被测工件表面形貌。实验结果表明，该方法可实现对大面形或曲率较大的高反射曲面三维形貌的测量，测量范围达到150 mm×150 mm×20 mm，测量精度约为40 μm。

关键词: 高反射曲面, 三维形貌测量, 光栅相位偏折, 区域波前重构, 路径积分, 时间相位展开

Abstract: To solve the requirement for the 3D shape measurement of specular surface, a novel method of phase deflectormetry based on iterative strategy is proposed. The corresponding relationship between the phase deflectormetry information and the gradient and height is established. The 3D reconstruction algorithm combined zonal wave-front reconstruction and path-integration is applied to recover the profile of the parts from the gradient information. Experimental results show that this method can be used to measure the 3D shape of sepcular surface with large topography or curvature. The measurement range is 150 mm×150 mm×20 mm and the measurement accuracy is about 40 μm.

Key words: specular surface, 3D shape measurement, phase deflectormetry, zonal wave-front reconstruction, path integration, temporal phase unwrapping

中图分类号: 

• TP391