Abstract: This paper proposes a model method of extended object-orient hybrid Petri net (EOHPN). To treat with the complexity of the wafer fabrication systems, object-oriented abstraction mechanisms such as encapsulation and classification are combined into EOHPN models. To reduce the complexity of the systems, a hybrid Petri net is introduced and extended with object-oriented modeling technology. Development of object models is suggested on the basis of the defined EOHPN. And a case is presented to illustrate how the proposed EOHPN is used to model the wafer fabrication systems. The resulting model validates that the EOHPN can deal with the modeling complexity of the wafer fabrication systems

Key words: Wafer fabrication, Petri nets, Object-oriented model, Hybrid system, Modeling

摘要： 提出了一种扩展的面向对象混合Petri网（EOHPN）的建模方法：针对晶圆制造系统的复杂性，在EOHPN模型中融入了面向对象的抽象机制；为了减少系统建模的复杂性，引入混合Petri网并用面向对象建模技术作了扩展。在定义EOHPN模型的基础上，作了对象模型的拓展。用实例描述了基于EOHPN的晶圆制造系统的建模过程，验证了模型在处理系统建模时的有效性。

关键词: 晶圆制造, Petri网, 面向对象模型, 混合系统, 建模

CLC Number: 

• TP391