Abstract: The impedance matching is an essential part of a RF system in order to avoid reflections and optimize the operation of the generator. The discussion about matching algorithm based on gradient information of reflection coefficient magnitude is made. This paper presents the structure of automatic impedance matching apparatus briefly. To improve the performs of matching algorithm, a new method of automatic impedance matching is introduced.Comparison with both methods is made and result shows that the new approach can dramatically curtail the time of impedance matching.

Key words: automatic impedance matching, gradient, reflection coefficient

摘要： 阻抗匹配是射频系统中的重要组成部分，良好的阻抗匹配能够避免功率反射和优化射频源输出。针对梯度算法在自动阻抗匹配过程中的不足提出一种改进方法。介绍自动阻抗匹配器的系统结构，并对基于反射系数模的梯度信息的阻抗匹配算法进行讨论。对2种算法得到的结果进行比较，结果表明，该方法能够缩短匹配时间。

关键词: 自动阻抗匹配, 梯度, 反射系数

CLC Number: 

• TP391