Abstract: With wafer residency time constraints in cluster tools for semiconductor fabrication, feasibility of schedule and control can not be checked analytically. A new method based on simulation is presented, and a virtual single-arm cluster tool for controller testing is developed by using eM-Plant. It is a parameterized model which provides an effective tool for researchers to study the control problem of cluster tools, and for engineers to check feasibility of a schedule for them.

Key words: wafer fabrication, cluster tool, simulation

摘要： 针对难以用解析法验证半导体加工装置的调度可行性问题，提出仿真建模研究的新方法。利用仿真软件eM-Plant建立晶圆制造中单臂自动组合装置的参数化仿真模型，构建一个虚拟的晶圆制造系统。该系统为研究自动组合装置控制问题提供有效手段，是验证半导体制造生产调度可行性的仿真平台。

关键词: 晶圆制造, 自动组合装置, 仿真

CLC Number: 

• N945